Clean Robots

Semiconductor and Electronics

HIGH-PERFORMANCE SPECIALIZED HANDLING ROBOTS

Kawasaki offers a full line of industry-leading semiconductor and electronics handling robots. These robots are built for use in cleanroom applications, including ISO Class 1. Speed, accuracy, and reach make these robots ideal for handling delicate semiconductor wafers, LCD panels, organic EL, and solar panels.

Clean Robots:

Click on a series below to learn more. Note: images not shown to scale.

  • Kawasaki NTS series

    NTS Series

    Horizontal Articulated Arm

    NTS Series
  • Kawasaki TTS series

    TTS Series

    Telescopic Horizontal
    Articulated Arm

    TTS Series

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    Kawasaki Clean Robots Brochure

     
    SMOOTH OPERATION

    The NTS and TTS series robot can access 2 and 3 FOUPs of EFEM without a track. The specially designed drive system enables the robot to move incredibly smoothly and with high precision.

    UNIQUE AND HIGHLY RIGID TELESCOPIC MECHANISM
    The TTS series design utilizes the NTS series horizontal articulated arm with a highly rigid telescopic base, delivering high-speed handling in high and low positions.
    COMPLIANT WITH SEMI STANDARDS
    The NTS and TTS series satisfy the SEMI-F47 standard. It also meets the SEMI-S2 standard with sufficient consideration given to the environment and personal safety.