Semiconductor and Electronics
HIGH-PERFORMANCE SPECIALIZED HANDLING ROBOTS
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- SMOOTH OPERATION
The NTS and TTS series robot can access 2 and 3FOUPs of EFEM without a track. The specially designed drive system enables the robot to move incredibly smoothly and with high precision.
- UNIQUE AND HIGHLY RIGID TELESCOPIC MECHANISM
- The TTS series design utilizes the NTS series horizontal articulated arm with a highly rigid telescopic base, delivering high-speed handling in high and low positions.
- COMPLIANT WITH SEMI STANDARD
- The NTS and TTS series satisfies the SEMI-F47 standard. It also meets the SEMI-S2 standard with sufficient consideration given to the environment and personal safety.