Clean Robots
Semiconductor and Electronics
HIGH-PERFORMANCE SPECIALIZED HANDLING ROBOTS
Clean Robots:
Click on a series below to learn more. Note: images not shown to scale.
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NTS Series
Horizontal Articulated Arm
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TTS Series
Telescopic Horizontal
Articulated Arm
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- SMOOTH OPERATION
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The NTS and TTS series robot can access 2 and 3 FOUPs of EFEM without a track. The specially designed drive system enables the robot to move incredibly smoothly and with high precision.
- UNIQUE AND HIGHLY RIGID TELESCOPIC MECHANISM
- The TTS series design utilizes the NTS series horizontal articulated arm with a highly rigid telescopic base, delivering high-speed handling in high and low positions.
- COMPLIANT WITH SEMI STANDARDS
- The NTS and TTS series satisfy the SEMI-F47 standard. It also meets the SEMI-S2 standard with sufficient consideration given to the environment and personal safety.