TTS Series Robot

The TTS series robot can access 2 and 3 FOUPs of EFEM without a track. The specially designed drive system enables the robot to move incredibly smoothly and with high precision. In addition, its rigid telescopic mechanism delivers high-speed handling in high and low positions.


The series is compliant with the SEMI-F47 standard as well as the SEMI-S2 standard.

TTS SERIES ROBOTS:

TTS10 Degree of freedom - 4 axes
TTS20 Degree of freedom - 5 axes

Applications:

TTS

TTS20

*The standard robot arm does not include a hand.

Layout Example


The TTS series can be used for 2 to 3 FOUPs of EFEM without a track.

DATA DOWNLOAD

view spec

TTS Series Specifications

Model Standard Option
TTS10 TTS20
Structure Telescopic horizontal articulated type -
Arm Single arm Double arm -
Degree of freedom (axes) 4 5 -
Motion range θ1 axis (rotation・JT2)(°) 340 -
Z axis (up-down・JT3)(㎜) 740 -
θ2 axis (rotation・JT4)(°) 340 -
H1 axis (rotation・JT6)(°) 340 -
H2 axis (rotation・JT7)(°) - 340 -
Maximum reach (mm) 1,066 -
Repeatability (mm)*1 ±0.1 (Wafer Center) -
Cleanliness*2 ISO Class 1 -
Hand specification*3 - - Edge gripper / Vacuum
Controller D60 Teach pendant
Robot haness (1-5m)*4 Operation box
Software Standard software for oparation KRET
KMTerm KR3D
KSUtility Lite KSUtility
Manual Operation manual -
Communication command manual -
Introduction procedure for integrated package software (K-Fast) -
Others - Aligner
- Mapping sensor

*1: The figure conforms to ISO9283.

*2: The figure is measured in our clean booth.

*3: The standard robot arm does not include a hand.

*4: A robot harness is available with the length from 1 to 5 meters (1, 2, 2.5, 3, 3.5, 4, 4.5, and 5).


For more detail, please contact Kawasaki representatives in your region.

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