NX Series Robot

Semiconductor, Organic EL

MEDIUM REACH HORIZONTAL ARM

The NX series of clean robots is designed to be used with two or three 300 mm FOUPs without a track. The NX series is similar in design to the NS series, however an additional independent axis replacing the RTZ motion design significantly increases the motion range of the NX.

NX SERIES ROBOTS:

NX510 2 links, single arm
NX520 2 links, double arm
NX540 3 links, single arm

Applications:

Clean Robot Peripherals:

NX520

NX520

DATA DOWNLOAD

EXCEPTIONAL REACH
Single NX series arm can reach two or three FOUPs without the need for a linear axis. The arm is designed to be highly rigid and to access wafer stages with a narrow pitch as well as FOUPs in arbitrary positions.
HIGH THROUGHPUT
The NX series realizes high throughput of 200 wafers per hour (WPH) from FOUP to the aligner, then to the stage with a double arm manipulator such as the NX520.
SEMI F47 COMPLIANT
NX models instantaneously respond to electrical fluctuations, such as a drop in voltage, and automatically resume operation when voltage is restored.
SEMI S2 COMPLIANT
NX models meet specific considerations for environment and personal safety.
COLLISION DETECTION
Both software and hardware components are equipped with collision detection features to lessen the damage of delicate and specialized equipment caused by collisions.
VIEW SPEC

NX Series SPECIFICATIONS

MODEL NX510 NX520 NX540
Structure Horizontal articulated type
Degrees of Freedom 4 axes 5 axes 4 axes
Link 2 2 3
Motion Range θ axis
(rotation JT2)
330° 330° 318°
440 mm 440 mm 440 mm
Z axis
(up-down JT3)
832 mm 832 mm 1,232 mm
336° 336° 336°
X axis
(in/out JT4)
- 336° -
W axis - lower
(rotation JT6)
W axis - upper
(rotation JT7)
Repeatability ± 0.1 mm (wafer center) ±0.25 mm
Cleanliness*1 ISO Class 1
Controller D60/D61 (see Clean Controllers for specifications)

*1: Measured in Kawasaki's clean booth

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