NTS Series Robot
The NTS series robot can access 2 and 3 FOUPs of EFEM without a track.
The specially designed drive system enables the robot to move incredibly smoothly and with high precision.
The series is compliant with the SEMI-F47 standard as well as the SEMI-S2 standard.
NTS SERIES ROBOTS:
NTS10 Degree of freedom - 4 axes
NTS20 Degree of freedom - 5 axes
Applications:
NTS10
*The standard robot arm does not include a hand.Layout Example
The NTS series can be used for 2 to 3 FOUPs of EFEM without a track.
DATA DOWNLOAD
NTS Series SPECIFICATIONS
| Model | Standard | Option | ||
|---|---|---|---|---|
| NTS10 | NTS20 | |||
| Structure | Horizontal articulated type | - | ||
| Arm | Single arm | Double arm | - | |
| Degree of freedom (axes) | 4 | 5 | - | |
| Motion range | θ1 axis (rotation・JT2）(°) | 340 | - | |
| Z axis (up-down・JT3)(㎜) | 470 | - | ||
| θ2 axis (rotation・JT4)(°) | 340 | - | ||
| H1 axis (rotation・JT6)(°) | 340 | - | ||
| H2 axis (rotation・JT7)(°) | - | 340 | - | |
| Maximum reach(mm) | 1,066 | - | ||
| Repeatability (mm)*1 | ±0.1 (Wafer Center) | - | ||
| Cleanliness*2 | ISO Class 1 | - | ||
| Hand specification*3 | - | - | Edge gripper / Vacuum | |
| Controller / Power Requirements | D60 / MAX.1.0kVA | Teach pendant | ||
| Robot haness (1-5m)*4 | Operation box | |||
| Software | Standard software for oparation | KRET | ||
| KMTerm | KR3D | |||
| KSUtility Lite | KSUtility | |||
| Manual | Operation manual | - | ||
| Communication command manual | - | |||
| Introduction procedure for integrated package software (K-Fast) | - | |||
| Others | - | Aligner | ||
| - | Mapping sensor | |||
*1: The figure conforms to ISO9283.
*2: The figure is measured in our clean booth.
*3: The standard robot arm does not include a hand.
*4: A robot harness is available with the length from 1 to 5 meters (1, 2, 2.5, 3, 3.5, 4, 4.5, and 5).
For more detail, please contact Kawasaki representatives in your region.
Contact
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