NT Series Robot

Semiconductor, Organic EL, LCD panel, Solar panel

LONG REACH HORIZONTAL ARM

The NT series clean robot is designed to give a single robot the reach to tend up to four FOUPs without using a linear axis. The NT series incorporates the next-generation design to handle either 300 mm or 450 mm wafers at a rate of 400 wafers per hour (WPH) without an aligner.
  • NT410/NT510

    NT410/NT510

  • NT420/NT520

    NT420/NT520

  • NT620

    NT620

NT SERIES ROBOTS:

NT410 / NT510 Single arm
NT420 / NT520 Double arm
NT620 Ceiling mount double arm

Applications:

Clean Robot Peripherals:

DATA DOWNLOAD

EXCEPTIONAL REACH
Single NT series arm can reach up to four FOUPs. An optional linear axis is available to increase the maximum number of FOUPs to five.
HIGH THROUGHPUT
The throughput of the standard NT robot is 280 wafers per hour (WPH) with aligner and 400 WPH without aligner. An optional gripper is available that increases the throughput to 700 WPH.
SEMI F47 COMPLIANT
NT models instantaneously respond to electrical fluctuations, such as a drop in voltage, and automatically resume operation when voltage is restored.
SEMI S2 COMPLIANT
NT models meet specific considerations for environment and personal safety.
COLLISION DETECTION
Both software and hardware components are equipped with collision detection features to lessen the damage of delicate and specialized equipment caused by collisions.
CEILING MOUNT
The NT620 model features a ceiling mount specification design for use in a chemical liquid environment while meeting ISO Class 1 requirements.

Application Example

The wide motion range of the NT series makes it possible to access the main chamber without the need for a shuttle or an extra robot.

Layout Example

A single NT series robot is able to access all EFEMs with 2 to 4 FOUPs without a track.

VIEW SPEC

NT Series SPECIFICATIONS

Model NT410 NT420 NT510 NT520 NT620
Structure Horizontal articulated type
Degrees of Freedom 4 axes 5 axes 4 axes 5 axes 5 axes
Motion Range θ1 axis
(rotation JT2)
340° 340° 340° 340° 340°
Z axis
(up-down JT3)
400 mm 400 mm 470 mm 470 mm 600 mm
θ2 axis
(rotation JT4)
340° 340° 340° 340° 340°
H1 axis
(rotation JT6)
340° (380°) *2 340° (380°) *2 340° (380°) *2 340° (380°) *2 340° (380°) *2
H2 axis
(rotation JT7)
- 340° - 380° 380°
Maximum Reach 1,230 mm 1,280 mm 1,230 mm 1,280 mm 1,250.7 mm
Repeatability ± 0.1 mm (wafer center)
Cleanliness*1 ISO Class 1
Controller D60/D61 (see Clean Controllers for specifications)

*1: Measured in our clean booth *2: As option

Contact

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  • Click here or call (855) 855-1414

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