NS Series Robot

Semiconductor, Organic EL, LCD panel

CLASSIC HORIZONTAL ARTICULATED ARM

The NS series clean robot is known for its long term field use proving they have the reliability and high level of performance required by 300 mm wafer handling. The NS series features RTZ manipulator motion with optional lengths of a linear axis for additional FOUP reach.
  • NS410

    NS410

  • NS420

    NS420

  • NS511

    NS511

NS SERIES ROBOTS:

NS410 / NS510 Single arm
NS411 Single arm with flip
NS420 Double arm
NS511 Ceiling Mount with flip

Applications:

Clean Robot Peripherals:

DATA DOWNLOAD

SEMI F47 COMPLIANT
NS models instantaneously respond to electrical fluctuations, such as a drop in voltage, and automatically resume operation when voltage is restored.
SEMI S2 COMPLIANT
NS models meet specific considerations for environment and personal safety.
COLLISION DETECTION
Both software and hardware components are equipped with collision detection features to lessen the damage of delicate and specialized equipment caused by collisions.
FLIP GRIPPING AXIS
The NS411 model features an additional axis to handle wafers at both horizontal and vertical angles.
CEILING MOUNT
The NS511 model features a ceiling mount specification design for use in a chemical liquid environment while meeting ISO Class 5 requirements.
VIEW SPEC

NS Series SPECIFICATIONS

Model NS410 NS411 NS420 NS510 NS511
Structure Horizontal articulated type
Degrees of Freedom 3 axes 4 axes 4 axes 3 axes 4 axes
Motion Range Y axis
(travel JT1)
2 FOUP: 660 mm / 3 FOUP: 1,070 mm
4 FOUP: 1,670 mm
- -
θ axis
(rotation JT2)
380° 325° 325° 360° 473°
Z axis
(up-down JT3)
380 mm 380 mm 380 mm 440 mm 440 mm
X axis
(up-down JT4)
710 mm 798 mm X1: 646.8 mm
X2: 646.8 mm
598 mm 816.5 mm
F axis
(rotation JT5)
- 156° - - 200°
Repeatability ± 0.1 mm (wafer center)
Cleanliness*1 ISO Class 2 ISO Class 5
Controller D60/D61 (see Clean Controllers for specifications)

*1: Measured in Kawasaki's clean booth

Contact

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  • Click here or call (855) 855-1414

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