Semiconductor Robotic Automation
Precise, Scalable Robotics for a Rapidly Changing Industry
Outflank the Competition with Versatile, Adaptable AutomationKawasaki Robotics’ industry-leading suite of compact, accurate, high-speed semiconductor robots enable manufacturers to automate silicon wafer transfer and logistics throughout the integrated circuit manufacturing process and meet today’s demanding throughput requirements. Our cleanroom ISO Class 1 robots can handle 300 mm and 450 mm wafers through the production space without damage or disruption, moving wafers from FOUPs (front opening unified pods) to process tool chambers. Kawasaki robots reduce error rates, boost quality and improve throughput.
With Kawasaki Robotics’ flexible automation solutions at their disposal, nimble semiconductor equipment manufacturers can expect to retain their competitive edge.